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Keyword [Linear motor driven]
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1. Dyanmic Modeling And Simulation Of The Extreme Ultra Violet Lithography Wafer Stage
2. Friction Coefficient Changed Inchworm-like Robot With The Linear Motor Driven
3. A performance-oriented multi-loop control of systems with constraints and uncertainties
4. Observer based adaptive robust control with application to coordinated precision control of linear motor driven high speed electro-mechanical systems
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