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Keyword [Deep reactive ion etching]
Result: 1 - 7 | Page: 1 of 1
1. High Efficiency Transmitarray Antenna Research
2. Study Of Micromachined Inertial Sensors Based On A Novel Comb-bar Capacitor Scheme
3. High-Aspect-Ratio Micro-and Nanostructures:Simulation,Fabrication,and Application
4. Research Of FBAR Fabrication And Application
5. Study Of Silicon Deep Reactive Ion Etching Process For MEMS Packaging
6. Characterization of deep reactive ion etching (DRIE) for via formation in chip stacking applications
7. Design And Fabrication Of Variable Optical Attenuator Based On MEMS
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