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Keyword [DRIE]
Result: 1 - 20 | Page: 1 of 1
1.
High Efficiency Transmitarray Antenna Research
2.
Study Of Micromachined Inertial Sensors Based On A Novel Comb-bar Capacitor Scheme
3.
Investigation Of Electro Chemical Deep Etching Technology For Micro-nano-Electro-Mechanical System Device Fabrication
4.
Design And Fabrication Research Of MEMS-Based Electric Field Sensors
5.
Investigation Of A 3D PN Junction Structure
6.
Analyses Of A Novel Micro-inertial Sensor With Actuators Drived By Electrostatic Force For Increasing The Initial Sensing Capacitance
7.
Study On Trough-Silicon Via Etch And Related Processes For Memory 3D Stack
8.
Study On High Performance Terahertz Passive Device
9.
Research On High Performance Terahertz Filter
10.
Study On Overall Equipment Effectiveness Of Vacuum Dry Etch Equipment
11.
Performance Optimization And Structure Design Of Piezoresistive Pressure Sensor
12.
The Design Of MEMS Thermal Wind Sensor With High Performance
13.
Research On Multi-spring Sensitive Suspension Of Low Frequency MEMS Acceleration Sensor
14.
Research On Capability MEMS Resonator Performance Changes Caused By Process Errors
15.
Characterization of deep reactive ion etching (DRIE) for via formation in chip stacking applications
16.
Development of DRIE CMOS-MEMS process and integrated accelerometers
17.
Optimized fabrication of ultra-deep reactive ion etched silicon components for the MEMS rotary engine power system
18.
Integrated and modular microfluidic technologies with applications to MicroInstruments
19.
On-demand routing in multi-hop wireless mobile ad hoc networks
20.
Frohlich-bipolaronen in twee en drie dimensies
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