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Keyword [Copper interconnects]
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1. Thermo-Elastic Analysis Of Air-Gap Copper Interconnects
2. A Novel Intergrated Circuit Cu Interconnect Process Research
3. Impact Of Electrochemical Copper Plating Process Optimization On Voids Defect
4. Study On The Thermal Stress Reliability Of Copper Interconnects In Ic
5. Theoretical Study Of Influences Of Skin Effect On Copper Interconnect Reliability Design In Integrated Circuits
6. Strategies Of RC Delay Reduction In45Nm BEOL Technology
7. ULSI Copper Interconnection Electromigration Reliability Research And Process Optimization
8. Research On Electromigration Of Copper Interconnects And Tin Whisker Growth
9. Study On The Electromigration Of Copper Interconnects With Side Reservoir
10. Study Of Barrier Laver Technology Of Semicondutor Wiring Of Cu
11. Control And Optimization Of Cu CMP Dishing In GLSI Multilayer Copper Interconnects
12. Reliability study on the via of dual damascene copper interconnects
13. Statistical analysis of electromigration lifetimes and void evolution in copper interconnects
14. The study of interface electromigration in copper interconnects
15. Investigation of the influence of microstructure on electromigration in damascene copper interconnects
16. Mechanism of electromigration failure in Damascene processed copper interconnects
17. Electromigration characterization of aluminum -copper alloy interconnects
18. X-ray microdiffraction study of copper interconnects
19. Dual Damascene copper interconnects with low-k polymer dielectrics
20. Modeling of electromigration and stress migration in copper interconnects prepared by chemical-mechanical polishing
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