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Keyword [Capacitively coupled plasma]
Result: 1 - 3 | Page: 1 of 1
1.
Investigation On Trench Etching In SiCOH Low-k Films By C
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F
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/O
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/Ar Dual-frequency Capacitively Coupled Plasma
2.
Study Of The Neutral Gas Flow On Discharges Of Capacitively Coupled Plasma In A PECVD Reactor
3.
Rational design of non-damaging capacitively coupled plasma etching and photoresist stripping processes for ultralow k dielectric materials
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