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Keyword [CMOS MEMS]
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1. Research On CMOS Intgrated Two-Dimensional Themal Wind Sensor
2. Research On CMOS Intgrated Two-Dimensional Themal Wind Sensor
3. CMOS Integrated Thermal Wind Sensor And Circuit Design
4. Research On Interface Circuits Of MEMS Capacitive Sensors
5. Study Of Small Capacitance Readout Technology For MEMS Sensors
6. Triaxial Capacitive Accelerometer Based On The Monolithic Integration Of CMOS MEMS
7. Design and microfabrication of a CMOS-MEMS piezoresistive accelerometer and a nano-Newton force sensor
8. SOI-CMOS-MEMS electrothermal micromirror arrays
9. CMOS-MEMS probes
10. A CMOS-MEMS probe microsystem for nuclear magnetic resonance force detection
11. Design and development of RF CMOS MEMS switches for configurable RF circuits
12. CMOS-MEMS resonators for mixer-filter applications
13. Silicon on insulator CMOS and microelectromechanical systems: Mechanical devices, sensing techniques and system electronics
14. Development of DRIE CMOS-MEMS process and integrated accelerometers
15. Integrated CMOS MEMS RF tunable filters
16. CMOS-MEMS Variable Capacitors for Reconfigurable RF Circuits
17. Modeling and simulation of non-idealities in a Z-axis CMOS-MEMS gyroscope
18. Sensing and control electronics design for capacitive CMOS-MEMS inertial sensors
19. Inertial Sensor Design at Dynamic Range Extremes: Integrated CMOS-MEMS high-g and mu-g accelerometers
20. Integrated multiple device CMOS-MEMS IMU systems and RF MEMS applications
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