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Keyword [Bulk-micromachining]
Result: 1 - 11 | Page: 1 of 1
1.
A High Performance Accelerometer With A Newly Developed Silicon Bulk Micromachining Technology
2.
Research On Silicon-based Bulk Micro-machined Amperometric Microelectrode Biosensors
3.
Design And Fabrication Research Of MEMS-Based Electric Field Sensors
4.
Study Of Silicon MEMS Based Two Dimensions Biomedical Microprobe Array
5.
Study On Terahertz Filter Circuit
6.
Design And Fabrication Of The CMOS Compatible Micro-hotplate Gas Sensor
7.
Study On Terahertz Power Divider And Combiner
8.
Research On Design,Fabrication And Mass Calibration And Testing Of Micro Silicon Pressure Sensors
9.
Hybrid surface-/bulk-micromachining processes for scanning micro-optical components
10.
Bulk micromachining of silicon for MOEMS prototype
11.
Silicon bulk micromachining in MEMS packaging and optical applications
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