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Keyword [BCB bonding]
Result: 1 - 3 | Page: 1 of 1
1.
Design And Fabrication Of Grating-coupled Silicon-based Hybrid Integrated Germanium Photodiodes
2.
Design And Fabrication Of A MEMS-based Electric Field Sensor Based On BCB Bonding
3.
Low temperature wafer scale MEMS packaging and intrapackage humidity monitoring
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