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Keyword [phase-stepping microscopic interferometry]
Result: 1 - 2 | Page: 1 of 1
1.
Study On Out-of Plane Motion In MEMS Using Phase-stepping Microscopic Interferometry And Stroboscopic Imaging Technique
2.
MEMS Out-of-plane Test Based On Phase-stepping Microscopic Interferometry Microscope And In-plane Motion Compensation
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