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Keyword [out-of plane motion]
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1. Study On Out-of Plane Motion In MEMS Using Phase-stepping Microscopic Interferometry And Stroboscopic Imaging Technique
2. MEMS Out-of-plane Test Based On Phase-stepping Microscopic Interferometry Microscope And In-plane Motion Compensation
3. Measurement Of Out Of Plane Motion For MEMS Based On Phase-shift Interferometry
4. Artificial Boundary Condition Based On Continued Fraction Of Dynamic Stiffness Matrix Of Infinite Multi-layrted Media
5. Study On Numerical Simulation Of ZXZ Explicit Integration Algorithm Performance
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