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Keyword [electrostatic comb]
Result: 1 - 7 | Page: 1 of 1
1.
Mechanical Performance Analysis And Experiment Research On Laterally Driven Electrostatic Comb Silicon Micro Resonators
2.
Research On Statics And Dynamics Of Electrostatic Comb-Drive In Micromachine
3.
The Mechanics Analysis Of MEMS Gyroscope With Electrostatic Comb-driver And Piezoelectric Thin Films Read-out
4.
Study Of GaN Electrostatic Comb Actuators On Patterned-SOI
5.
Study Of Electrostatic Comb Driver Used For Movable GaN Micro Mirror
6.
MEMS metrology and materials characterization using resonant structures
7.
Electrostatic comb drive for resonant sensor and actuator applications
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