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Keyword [comb structure]
Result: 1 - 3 | Page: 1 of 1
1.
Design Of An Anti-high Overload MEMS Accelerometer With Comb Structure
2.
In-plane Sensing Mechanism And Device Optimization Of MEMS Capacitive Acoustic Emission Sensor
3.
Research On A 3D MEMS Scanning Micromirror Based On Vertical Comb-finger Structure And Electrostatic Actuation
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