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Keyword [PZT Film]
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1. Fabricated A New-type Piezoelectricity Microactuator By MEMS Technology
2. Applications Of Piezoelectric Bimorph Beams On Micromotors And Micro Force Sensors
3. Research On Design And Manufacturing Technology Of Piezoelectric Micro Battery For Vibration Energy Scavenging
4. Design And Research Of Piezoelectric Ultrasonic Traveling Wave Motor Based On PZT Film
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