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Keyword [LIGA process]
Result: 1 - 6 | Page: 1 of 1
1.
Study On Mems Technology Based Electro-Magnetic Planar Micromotor
2.
Study On The Internal Stress And Thermal Swelling Of SU-8 Photoresist In UV-LIGA Process
3.
Study On The Microchannel Heat Sink Of Metal Ceramic Composite Structure To Enhance Heat Dissipation
4.
Fabrication of high aspect ratio vibrating cylinder microgyroscope structures by use of the LIGA process
5.
Design, fabrication, and testing of cross flow micro heat exchangers
6.
Research On The Key Technology Of Preparing Comb-type High Aspect Ratio Micro Electrostatic Motor
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