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Keyword [FBAR]
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1. The Acoustic Thruster And Detector Based On MEMS
2. Research On Key Technologies Of Chip-scale Cesium Atomic Clocks
3. Design Of FBAR Micro-accelerometer
4. Piezoelectric MEMS for acoustic sensing, contactless RF switching, and resonant mass sensing
5. Development Of Gas Chromatography Detectors And Micro Gas Chromatography System Based On Bulk Acoustic Wave Resonators
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