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Keyword [Electrostatic MEMS]
Result: 1 - 4 | Page: 1 of 1
1.
Fabrication On Key Technology Of Electrostatic MEMS Capacitor With High Aspect Ratio Based On Silicon Structure
2.
Fabrication And Electrical Properties Of Electrostatic Silicon-based MEMS Capacitors
3.
Partial differential equations of electrostatic MEMS
4.
Nonlinear dynamics of electrostatically and magnetically actuated MEMS
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