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Keyword [Critical dimension]
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1. Development Of Dual-probe Atomic Force Microscope Measurement System
2. Broadband Spectroscopy Ellipsometry And Its Application & Research In Integrated Circuits
3. Research On The Size Effect Of Three-Graded Aggregate Concrete Behavior In Mechanics Performance
4. Research On Dual-probe Atomic Force Microscope System Used For Linewidth Measurement
5. Study On The Prediction Of The Critical Dimensions For Inclusions In Wheel Rim Crack
6. Scatterometry for semiconductor sub-micrometer and nanometer critical dimension metrology
7. Characterization and improvement of temperature and critical dimension uniformity in a microlithography cluster: An analytical and experimental study
8. Optimal design for simultaneous control of critical dimension and side wall slope in wet etching
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