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Keyword [Copper sacrificial layer]
Result: 1 - 3 | Page: 1 of 1
1.
An Electro Thero-Actuated Bidirectional Bistable Mems Relay And Its Integrated Micro Fabrication
2.
A Study Of New-type Micro Electro-thermal Actuator
3.
Research Of A Novel Electrotheromal Microactuator And Bistable Structure
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