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Keyword [Comb drive]
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1. Dynamic Analysis And Mathematical Model Of Silicon Micromechanical Vibration Gyroscope
2. Basic Research On Microgripping Theoretics And System
3. Research On Statics And Dynamics Of Electrostatic Comb-Drive In Micromachine
4. Study On Fabrication Process Of Self-aligned Vertical Comb Actuator Using Silicon Plastic Deformation
5. Modeling And Simulation Of MEMS Optical Switch
6. The Mechanics Analysis Of MEMS Gyroscope With Electrostatic Comb-driver And Piezoelectric Thin Films Read-out
7. Study Of GaN Electrostatic Comb Actuators On Patterned-SOI
8. Study On The Influence Of Temperature And Machining Error On The Dynamic Of Comb-Drive Resonators
9. Fabrication Of Comb-drive MEMS Accelerometers
10. Nonlinear Dynamics Of Folded-MEMS Comb Drive Resonators With Time–Delayed Control
11. A study of parametric excitation applied to a MEMS tuning fork gyroscope
12. The design and manufacture of a comb-driven micropump
13. Development of MEMS device for biological analysis
14. Stability investigation at resonance of surface micromachined comb drive for application as a power source
15. MEMS metrology and materials characterization using resonant structures
16. Electrostatic comb drive for resonant sensor and actuator applications
17. Research On MEMS Scanning Mirror Applied In Lidar
18. A Study On Robust Design Of Comb MEMS Drives
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