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Keyword [AlN thin film]
Result: 1 - 6 | Page: 1 of 1
1.
SOI Novel Structure Fabrication And Investigation Of Suspended Type Thin Film Resonator Based On SOI
2.
Rf Reactive Magnetron Sputtering Of Ain Thin Films And Their Physical Properties
3.
Study On Key Technology Of Miniature AlN Piezoelectric Vibrating Energy Harvester
4.
Design And Application Of AlN Thin Film Based MEMS Piezoelectric Ultrasonic Transducers
5.
Temperature Measurement Mechanism And Method Of AlN Thin Film Based On Temperature-defect Repair Effect
6.
Research On The Performance Of MEMS Ultrasonic Transducer Based On AlN Thin Film
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