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Keyword [Sicoh]
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1. Effect Of Annealing On Structures And Properties Of CH4-doped SiCOH Films
2. Controlling Cu Diffusion In SiCOH Films By O2 Plasma Treatment
3. Preparation And Characterization Of Porous Sicoh Low Dielectric Constant Material Film
4. Preparation And Characterization Of Low-dielectric Constant SiCOH And SiCOF Films
5. Effect Of O2 Flow Rate And Low-frequency Power On Etching Characteristics Of SiCOH Low-k Films
6. Generation And Reduction Of Charge Produced By VUV Irradiation In Organosilicate Dielectrics
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