Low-k dielectric - Globe Thesis

Keyword [Low-k dielectric] Result: 1 - 14 \| Page: 1 of 1
1.	Study On Low-K Dielectric Properties Of K₂O-Al₂O₃-SiO₂ System Ceramic
2.	Cu Interconnect Dual Damascene Etch Process Development And Optimization Based On Metal Hard Mask Integration Approach
3.	Acoustic excitations in nanosponges, low-k dielectric thin films and oxide glasses
4.	Metallization and modification of low-k dielectric materials
5.	Physical-chemical interactions at metal/low-k dielectric interfaces
6.	Control of molecular contaminants in porous low-k dielectric films and in UHP gas delivery systems
7.	The Effects of Processing Induced Damage on Electrical Conduction Mechanisms and Time-Dependent Dielectric Breakdown of Low-k Organosilicates
8.	Thermal and electrical stability of metal/porous low-k dielectric interfaces
9.	The characterization of octafluorocyclobutane-based plasma discharges for the selective etching and processing of silicon dioxide and low-K dielectric thin films
10.	Integration of amorphous tantalum silicon nitride (TaSiN) films as diffusion barriers in a Cu/SiLK(TM) metallization scheme
11.	Synthesis and characterization of nanoporous silicon dioxide particulate for low defectivity in low-k dielectric chemical mechanical polishing
12.	Integration of polytetrafluoroethylene low-k dielectric material in a chemical vapor deposited aluminum metallization scheme
13.	Study of the thermal properties of low k dielectric thin films
14.	A study of polymeric materials for microelectronic applications: Low-k dielectric thin films and flip chip underfill encapsulants
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