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Keyword [Ion co-implantation]
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1. Helium And Hydrogen Ion Co-implantation Induced Surface Exfoliation In Si-based Materials And The Involved Mechanisms
2. Study On Damage And Mechanism In Crystal Silicon Co-implanted With Boron And Light Gas Ions
3. Study On The Bone Material Modified By Tantalum Implantation And Composite Film Containing Tantalum
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