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Keyword [Hot-wire CVD]
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1. Low-temperature Deposition Of Poly-silicon Thin Films By Hot-wire CVD And The Analysis On Characteristics
2. Influence Of Metal Underlayers On Low-temperature Deposition Of Poly-silicon Thin Films By Hot-wire CVD
3. Rapid Synthesis Of Si Nanocrystal Embedded In SiC Matrix Produced By Hot Wire CVD At Low Temperature
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