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Keyword [Dual damascene]
Result: 1 - 4 | Page: 1 of 1
1.
Cu Interconnect Dual Damascene Etch Process Development And Optimization Based On Metal Hard Mask Integration Approach
2.
Electromigration enhanced kinetics of copper-tin intermetallic compounds in lead-free solder joints and copper low-k dual damascene processing using step and flash imprint lithography
3.
Modeling the role of plating additives in the metallization of semiconductor interconnects: From dual damascene to through silicon vias
4.
Multilevel Dual Damascene copper interconnections
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