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Keyword [Cu interconnect]
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1. Microstructure And Stress Of ULSI Cu Interconnects And Their Impacts On Electromigration
2. The Application Of Cluster-plus-glue-atom Model In Barrierless Cu-Ni-Ti And Cu-Ni-Ta Films
3. Study On The Mechanical And Electrical Properties Of Cu-Cu Interconnect Based On The Nanocopper Pastes
4. Cu Interconnect Dual Damascene Etch Process Development And Optimization Based On Metal Hard Mask Integration Approach
5. Study On Microstructure And Mechanical Properties Of Sn58Bi/Cu Column Friction Welding Spot
6. Low-temperature Interconnection Process Of Al/Cu Joints Under Ultrasonic-assisted With The Help Of Nano-particles And Its Reliability
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