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Keyword [tuned substrate self-bias]
Result: 1 - 3 | Page: 1 of 1
1.
Characteristics Of The Tuned Substrate Self-bias In A RF Inductively Coupled Plasma
2.
Numerical Studies On Tuned Substrate Self-bias In A Radio-frequency Inductively Coupled Plasma
3.
The Effect Of Capacitive-coupling On Discharge Modes And Tuned Substrate Self-bias In A Radio-frequency Inductively Coupled Plasma
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