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Keyword [soft x-ray multilayer]
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1. Study Of Some Basic Problems Of Soft X-ray Multilayer
2. Design And Production Of Soft X-ray Multilayer Mirrors
3. Study On Thickness Distribution Uniformity Control Of Soft X-ray Multilayer Mirrors
4. Structure And Thermal Stability Of Ti/Al And Ti/SiO2/Al/SiO2 Soft X-ray Multilayers
5. Development of extreme ultraviolet and soft x-ray multilayer optics for scientific studies with femtosecond/attosecond sources
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