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Keyword [rf-bias]
Result: 1 - 3 | Page: 1 of 1
1.
Experimental Investigation Of Discharge Mode Transition And Hysteresis In Radio-Frequency Inductively Coupled Plasma
2.
Two-dimensional Fluid Simulation Of The RF Bias Plasma Sheath Characteristics
3.
Measurements and simulations of ion energy distributions at rf-biased substrate electrodes in high density plasma reactors
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