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Keyword [porous SiCOH films]
Result: 1 - 2 | Page: 1 of 1
1.
The Effect Of O Plasma Treatment On Porous SiCOH Films
2.
Effect Of C:F Deposition On Etching Of SiCOH Low-k Films In CHF
3
Dual-frequency Capacitively Coupled Plasma
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