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Keyword [low dielectric constant]
Result: 1 - 8 | Page: 1 of 1
1.
Investigation On ECR Plasma Deposition And Dielectric Property Of SiCOH Low-k Films
2.
Investigation On Low-κ SiCOH Films Prepared By ECR-CVD And The Influence Of Fluorine Incorporation
3.
Deposition Of CH
4
-doped SiCOH Films And Investigation Of Properties
4.
The Effect Of O Plasma Treatment On Porous SiCOH Films
5.
Investigation Of Nano-SiC Film Photoluminescence And Nanoporous SiO
2
:F Film With Low Dielectric Constant
6.
Study On The Preparation Of Low Dielectric Constant CN_x Films
7.
Preparation And Structure Of Fluorinated Amorphous Carbon Films Pecvd And Performance
8.
Low dielectric constant fluorocarbon films containing silicon by plasma enhanced chemical vapor deposition
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