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Keyword [capacitively coupled discharge]
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1. Two-dimensional PIC/MC Simulation Of A Capacitively Coupled RF Glow Discharge In Nitrogen
2. Ion Energy And Angular Distributions Manipulated By Pulse Bias In Capacitively Coupled Discharge
3. The Characteristics Of Capacitively Coupled Discharge Driven By Direct Current Combined With Dual Frequency Sources
4. Study Of The Striations In Radio Frequency Capacitively Coupled Discharge In Ar
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