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Keyword [Sih4]
Result: 1 - 5 | Page: 1 of 1
1.
One-dimensional Fluid Model Of Pulse Modulated Radio-frequency SiH
4
/N
2
/O
2
Discharge
2.
One-dimensional Simulation Of Pulse Modulated Radio-frequency SiH
4
/N
2
/N
2
O Discharge
3.
Two-dimensional Simulation Of Pulse Modulated Radio-frequency SiH
4
/N
2
/O
2
Discharge
4.
Numerical Simulation On Plasma Chemistry In Radio Frequency Capacitively Coupled Plasmas Sustained In SiH
4
Mixture Gases
5.
Application of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with silane-ammonia gas mixtures
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