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Keyword [Sicl]
Result: 1 - 2 | Page: 1 of 1
1.
Research Of Diagnostics Of A Novel Atmospheric Pressure RF Ar/H
2
/SiCl
4
Plasma Jet And Its Deposition Of Silicon Film
2.
Electron impact ionization of trichlorosilyl, dichlorosilylene, and chlorosilylidyne
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