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Keyword [SiH4/N2/O2]
Result: 1 - 2 | Page: 1 of 1
1.
One-dimensional Fluid Model Of Pulse Modulated Radio-frequency SiH
4
/N
2
/O
2
Discharge
2.
Two-dimensional Simulation Of Pulse Modulated Radio-frequency SiH
4
/N
2
/O
2
Discharge
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