Font Size:
a
A
A
Keyword [SiCOH films]
Result: 1 - 7 | Page: 1 of 1
1.
Investigation On Low-κ SiCOH Films Prepared By ECR-CVD And The Influence Of Fluorine Incorporation
2.
Deposition Of CH
4
-doped SiCOH Films And Investigation Of Properties
3.
Deposition Of O-doped SiCOH Films And Investigation Of Properties
4.
The Effect Of O Plasma Treatment On Porous SiCOH Films
5.
Investigation Of Plasma Chemistry In The Deposition Of F-doped SiCOH Films
6.
Investigation Of Etching SiCOH Films By Dual-Frequency Capacitively Coupled Plasma
7.
Effect Of C:F Deposition On Etching Of SiCOH Low-k Films In CHF
3
Dual-frequency Capacitively Coupled Plasma
<<First
<Prev Next>
Last>>
Jump to
