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Keyword [Micro-Electro-Mechanical System]
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1. Study On Nonlinear Dynamics Of Micro-electro-mechanical System
2. Research On Key Techniques Of The Planar Microcoil For Protable Nmr Detection
3. Research On Tuning Characteristics Of MEMS Based On Tunable Vertical Cavity Surface Emitting Laser
4. Simulation Of A Piezoelectric MEMS Accelerometer Using 3D Finite Element Modeling
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