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Keyword [Electron energy probability function]
Result: 1 - 2 | Page: 1 of 1
1.
Hybrid Simulation Of Electron Kinetic Properties In Radio Frequency Capacitively Coupled Plasmas Sustained In Reactive SiH
4
/Ar Discharges
2.
Experimental Research On The Electron Beam Driven And Modulated Capacitively Coupled Plasma
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