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Keyword [ECR Plasma Source]
Result: 1 - 3 | Page: 1 of 1
1.
MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering And Carbon Nitride Films Preparation
2.
Ground Laboratory Simulation Of Space Plasma Environment And Solar Cells Effect Of Preliminary Experimental Study
3.
Characterization and modeling of a compact ECR plasma source designed for materials processing
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