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Keyword [Collisionless Heating]
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1. Kinetic Simulations And Experimental Diagnosis Of Inductively Coupled Plasma Reactors
2. Two-dimensional Fluid Simulation Of Dual-Chamber Radio-Frequency Inductively Coupled Argon Plasma Source Based On COMSOL Software
3. PIC/MCC Simulations For Nonlocal Electron Kinetics In Capacitively Coupled Argon Plasmas
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