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Keyword [Capacitively-coupled]
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1. The Hybrid Simulation Of A Dual-frequency Capacitively Coupled Plasma
2. Electromagnetic Wave Propagation In A Nonuniform Atmosphereic Pressure Plasma And An Experimental Study On A Low-pressure Capacitively Coupled Plasma
3. The Study Of Surface Hydrophobic And Oleophobic Modification Of Silicone Rubber By CF4 Radio Frequency Plasma
4. The Investigation On Dual Frequency Capacitively Coupled Plasma By Using Optical Emission Spectroscopy
5. Experimental Investigation On The Characteristics Of Dual-frequency Capacitively Coupled Plasmas
6. Two-Dimensional Implicit PIC/MC Simulations For Radio-Frequency Capacitively Coupled Plasmas
7. Simulation Of Growth Mechanism And Transport Of Nano-Scale Particles In Capacitively Coupled Silane Discharges
8. Diagnostic Investigation Of Dual-frequency Capacitively Coupled Plasmas Using Complete Floating Double Probe And Mass Spectrometry
9. The Design And Applications Of Fluid Simulation For Low Pressure Radio-frequency Capacitively Coupled Plasmas
10. Fluid Simulation For Charged Particle Transport In Capacitively Coupled Dual Radio-frequency Discharges
11. Simulation Of A Radio-frequency Capacitively-coupled Plasma With Fluid/Monte-Carlo Method
12. Simulation Of A Radio-frequency Capacitively-coupled Plasma With PIC/MCC Method
13. Two-dimensional PIC/MC Simulation Of A Capacitively Coupled RF Glow Discharge In Nitrogen
14. Fluid Simulation For Sheath Characteristics In Dual-frequency Capacitively Coupled Discharges
15. The Fluid Simulation Of N2-O2 Dual-Frequency Capacitively Coupled Plasma
16. Research On Characteristics Of Dust Particles In Dual-Frequency Capacitively Coupled Plasma Sheath
17. Investigation Of Etching SiCOH Films By Dual-Frequency Capacitively Coupled Plasma
18. Effect Of C:F Deposition On Etching Of SiCOH Low-k Films In CHF3 Dual-frequency Capacitively Coupled Plasma
19. Investigation On Characteristics Of C2F6 And C4F8 Dual-frequency Capacitively Coupled Plasmas
20. Influence Of Active Gas Mixed In Atmospheric-pressure Radio-frequency Capacitively Coupled Argon Plasma On The Discharge Characteristics
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