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Keyword [CHF3]
Result: 1 - 5 | Page: 1 of 1
1.
High Resolution Far Infrared Laser Spectroscopy Of Simple Stable And Unstable Molecules
2.
Investigation Of Etching SiCOH Films By Dual-Frequency Capacitively Coupled Plasma
3.
Effect Of C:F Deposition On Etching Of SiCOH Low-k Films In CHF
3
Dual-frequency Capacitively Coupled Plasma
4.
Spectroscopy Diagnostics Of CF
2
Number Density In CHF
3
/Ar Dielectric Barrier Discharge Plasma
5.
Fluid Simulation Of Radio Frequency Inductively Coupled CF
4
And CHF
3
Discharge At Low Pressure
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