A CMOS-MEMS probe microsystem for nuclear magnetic resonance force detection

This thesis describes the design, fabrication, and testing of a MicroElectroMechanical Systems (MEMS) integrated magnetic field sensor for force detection Nuclear Magnetic Resonance (NMR) spectroscopy. The sensor developed in the thesis allows for the measurement of magnetic resonance spectroscopy at sample volumes below 1 muL. For small sample volumes, force detection has been shown to out-perform traditional inductive magnetic resonance detection methods. The introduction of magnetic resonance measurements at these small volumes can allow for new equipment and methods in chemical and biological investigations and medical diagnosis.;The integrated electronics and MEMS components are designed and fabricated to create a magnetic field sensor which is smaller than 1 mm x 1 mm x 0.3 mm. Numerous tests were performed to determine the electrical, mechanical and system performance specifications of the design. Sensor testing indicates that a 0.2 pN minimum force can be detected, which is suitable for a proof-of-concept measurement of a micro-FDNRM system.;The system uses a MEMS-in-CMOS force sensor, which is coupled to a detection micro-magnet and used to measure the resonant magnetic field which is created by the magnetic resonance phenomenon. This sensor is built using a custom MEMS fabrication process developed by the author to machine the sensor from a CMOS chip, which also contains the integrated electronics required for the sensor. For proper specification and design of this sensor, and to prove the feasibility of a sub-muL force detection magnetic resonance spectroscopy system, the design and conceptualization of the entire micro NMR measurement system is also performed.