On a MEMS-based parametrically amplified atomic force sensor

A functional MEMS-based parametric amplifier is described. This system amplifies the output of a MEMS-based atomic-scale force microscope (AFM) tip. The components are individually characterized and then integrated to form a complete system. The parametric amplifier provides a power gain of 316.2 or 49.9 dB. The frequency of the atomic-scale force sensor changes by 62.4% when the tip is almost in contact with the sample.; This parametric amplifier system follows the behavior predicted by the Manley-Rowe theory, which establishes that the gain is proportional to the ratio of the input frequency to the output frequency. The power gain of our amplifier is also linear with regards to the input amplitude.; The force microscope provides a shift in its resonant frequency as the gap between the tip and the sample is reduced. The atomic-scale force acting on the MEMS tip cause the frequency shift. The behavior of this frequency shift varies with the shape of the tip and the type of material present on the tip. We have also operated our MEMS as a scanning capacitance microscope, detecting the electrostatic field between the tip and the sample. The system provides a one-dimensional scan of a sample surface.; The complete system, the tip with integrated parametric amplifier, generates amplification of an AFM measurement at a gain of 244 or 47.7 dB with an increased signal-to-noise ratio.