Failure Analysis Of Impact Acceleration Sensor Under Impact Load

Aiming at the failure mode of accelerometer in shock environment,the connection be-tween the structural response type of accelerometer and the inherent frequency of sensor,the duration of shock load is analyzed with the example of cantilever and cantilever-beam struc-ture.Three kinds of accelerometer's structure are simulated under shock load to obtain the acceleration with different duration that makes the max stress of micro-structure close to the allowable stress of silicon.The Hopkinson bar for the dynamical load of accelerometer is simulated,and flat projec-tile,cuspate projectile and pulse shaper are actualized.Simulation and actual test about the Hopkinson bar with flat projectile or cuspate projectile and pulse shaper are actualized then.Three kinds of accelerometer with different structure are shock loaded.Then the structure of failed accelerometers is scanned using X-ray,the chip of the accelerometer is observed after unsealed and some failure modes are analyzed.