Development On The Control System Of Efficient And Precision Processing Equipment For Quartz Wafer

With the rapid development of quartz crystal components industry,a higher processing quality and efficiency for quartz wafer is required.How to get the ultra-smooth,damage-free surface conveniently or efficiently is an important research direction of the ultra-precision polishing process technology for quartz wafer.Considering the research status and insufficient of domestic and foreign wafer polishing machine,this dissertation developed the control system of efficient and precision processing equipment for quartz wafer on the basis of improvements in the pressure loading system and polishing plate to meet the processing automation.Based on the analysis of processing factors' effect on polishing quality',this dissertation overally designed the control system of double-sided polishing machine.It focused on a polishing pressure loading system based on stepper motor and its sub-type PID controller.analysed its dynamic performance and optimized the pressure changes in sinusoidal curve.Meanwhile,the dissertation studied the double-loop speed control system of BLDCM to drive the polishing plates.the PI control of current loop and the fuzzy self-tuning PID control of speed loop to improve the speed control accuracy and achieve any combination of motor speed in flexibility.By the repeated polishing experiments it reached the high-precision and efficiency polishing of quartz wafer.