DJP-9BC Ultra-Precision Double Sided Polishing Machine Design And Experimental Study

With the fast development of the microelectronic and information technology, people show more demand about the surface processing accuracy of kinds of optoelectronic components. It is a hot-point of the research tendency to get the ultra-smooth and non-traumatic surface of the optoelectronic chip with high efficiency in the field of the ultra-precision polishing technology. The level of ultra-precision machining research and application in China lags behind the developed countries like the United States, Japan and Germany. So it is significant to develop the ultra-precision double sided polishing machine with independent property.Guided by the principle of double-sided polishing machine, this paper analyzes the polishing process and the main technological factors. Based on the working requirements of the machine, the paper designs the overall program of the double-sided polishing machine and proposes the General scheme of the host and the control system by studying the double-sided polishing machine equipment at home and abroad and putting forward the major defectives of the traditional double-sided polishing machine system. It focuses on the structural design of double-sided polishing machine drive system. The paper designs the major components of the double-sided polishing machine, such as the main axis, the long axis, the small axis, the large axis and so on. They are designed and checked in detail. Meanwhile, it analyzes the accuracy of the spindle system.Finally, in the newly developed ultra-precision double-sided polishing machine, quartz glass as object, the experiments are carried out. We performed different loading pressures on the stability of double-sided polishing experiments, and access to surface roughness and flatness and other data to achieve a double-sided surface of the ultra-precision polishing.In this paper, the double-sided polishing machine developed by summing up the double-sided polishing machine equipment at home and abroad, based on the level of domestic processing technology, to optimize the design of mechanical structure .This design achieved the goal of surface roughness less than 1nm ultra-smooth surface, reaching the accuracy requirements of similar products abroad.