The Research Of The Key Technologies Of IRFPA Automatic Testing Based On Vacuum Prober Bench

Because of every advantage of itself, the infrared thermal imaging technology has broad application prospects in the fields of military affairs and civilian applications. So many countries in the world attach great importance to infrared thermal imaging technology, and develop related technologies competitively. On account of the relatively late start of the infrared thermal imaging technology research in our country, there is a great gap between our country and foreign countries. In recent years, our country has made some progress in relative field of infrared thermal imaging technology. But China’s infrared thermal imaging technology is still far behind the world lead level in many aspects. So it is needed that speeding up the research of infrared thermal imaging technology.In this topic, we aim to speed up the research progress of infrared thermal imaging technology, reduce the period it, lifting the research efficiency, reduce cost of research and production. We researched the automatic testing technology before packaging of IRFPA based on UIRFPA which is the kernel of the infrared thermal imaging system. The solutions of automatic testing and some crucial questions of automatic testing are proposed and we deeply study the questions.In this thesis, the basic testing theories of IRFPA are presented first. On this basis, we improved the hardware part of the existing IRFPA testing system based on semi-automatic vacuum probe station, aiming at automatic testing. The testing hardware circuit is designed based on USB chip and FPGA chip. By the deeply research of the requirements of IRFPA testing and the programming control of the PAV200 probe station and automatic testing process, we found the methods of automatic testing and the regulation of the bias voltages and the performance evaluation of IRFPA. In terms of software, there are many modules, including a parameter setting module and a test control module and a bias voltages regulation module and a data acquisition module and a data analysis module and a PAV200 semi-automatic vacuum probe station control module. Among these modules, the test control module is the core of the software and plays a role in the integral control of testing process and there are three different control modes: manual test mode, mode of automatic test before the release of sacrificial layer, mode of automatic test after the release of sacrificial layer. As an important module by which the testing software controls the vacuum probe station and do testing, PAV200 control module can flexibly control the components of vacuum probe station, including object stage and portal bridge and microscope and black body. The bias voltages regulation module and data analysis module are the key modules of searching the best bias voltage of IRFPA and evaluating the performance of IRFPA in the tests. By comparing the performance of IRFPA under different bias voltages, we can find the best bias voltages. By comparing the performance of different IRFPAs under their best bias voltages, we can evaluate quality of the IRFPA chips.The research of this topic realized the automatic test before packaging of the VOx UIRFPA. The size of the UIRFPA can be 640×512, 384×288 and 320×240. By analyzing test data, we can get the characteristic parameters of UIRFPA and evaluate the UIRFPA chips.