| In modern optics engineering, methods of aspheric surface testing includecontour measurement, optical compensation testing and transmission spherecross-test, et al.. Optical compensation testing includes Null Lens compensationtesting and computer generated hologram(CGH) compensation. Null Lens containssome sphere surfaces. Its precision is restricted to the processing residual of spheresurfaces and assembly precision. Null Lens sometimes can not be designed, even forlarge mirrors. Aspheric surface tested with CGH is a independent opticalcompensation testing method. With the development of lithography, its precision ishigher and higher and gains a wide range of applications.Processing of CGH impacts the precision and diffraction efficiency ofwavefront created by CGH, and processing of CGH is very significant.Processing of CGH usually consists of two parts: laser direct writing andreactive ion etching. The dissertation studies some key problems about thefabrication of CGH.The dissertation contains four parts:1. the wavefront error and the diffraction efficiency of CGH caused by thefabrication errorsA comprehensive analysis of the wavefront error and the diffraction efficiencyfo CGH caused by the fabrication errors. Put forward a new model of CGH to guide the processing of CGH.2. laser direct writing and reactive ion etchingA comprehensive analysis of the basic principle of laser direct writing andreactive ion etching, complete some related process experiment.3. evaluation criteria, fabrication and application of amplitude CGHOn the basis of error analysis of amplitude CGH, put forward the evaluationcriteria of amplitude CGH. Produce an amplitude CGH RMS0.006. Form acomplete processing of amplitude. A lot of amplitude CGHs have been used in theengineering.4. evaluation criteria and fabrication of phase CGH.On the basis of error analysis of phase CGH, put forward the evaluationcriteria of phase CGH. Under different process conditions, produce two CGHs, andcompare them. |
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