| Wafer industry is one of the most important pillar industries in this area,which leading to more and more attention. When the produce of wafer isfinished, the wafer should be transmitted in different vacuum chambers. Forevery chamber, the situation is absolutely clean, at the same time, theoperation is also very accurate. That means the requirements and standers forrobots are much more rigorous.Vacuum robot is a kind of robot who can work in vacuum, mainly usedin semiconductor electronic manufacturing. It can transmit wafers under thevacuum situation. As an important part of the Vacuum Robot, the Teachingbox system is used to teach robot and set parameter. The operator send actionorders to robot though teaching box, on the other hand, he can getinformation of robot form the box. Teaching box can stop the robot in theemergency.The traditional teaching box mostly based on80C51or PLC. In general,man-machine interface is not friendly enough, the reaction rate was not quickenough. This study will apply a proposal of “ARM+Linux” solutions toindustrial robots teaching function. It turns out to be a good solution to theabove problems. Innovative design reduces the volume of the teach pendant,enriching the functionality of the device, and for the development ofsecondary development and repetition provides a good foundation. It is readyto be adjusted according to actual production needs because of embeddedsystems. An overall framework of the vacuum robot control system is proposed.Hardware system based on AT9G45is developed, which containsmicroprocessor module, memory module, human interface module andcommunication interface module. Based on the embedded Linux operatingsystem and Qt development tools, perspective system annoying interactiveinterface and communication interface driver is designed. The results showthat both the hardware system and the software system meet the requirement. |
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